POLARIMETRIC MEASUREMENT DEVICE AND METHOD WITH MICROSCOPIC RESOLUTION, POLARIMETRY ACCESSORY FOR MICROSCOPE, ELLIPSO-MICROSCOPE AND MICROSCOPE WITH ELLIPSOMETRIC CONTRAST

摘要

The present invention relates to a microscopic resolution polarimetric measuring device comprising in particular polarization conversion means able to modify the polarization of a beam to pass from a spatially uniform distribution to a cylindrical symmetry distribution around the optical axis. and conversely, said converting means being disposed on the axis of a focusing lens (7) for focusing said polarized beam of cylindrical symmetry onto the surface of a sample to be measured. The invention also relates to a micro-ellipsometer, an interferometric contrast microscope, a polarimetric microscope accessory, and a polarimetric measurement method.