Device for pumping e.g. load lock chamber, has reservoir including inlet that communicates with conduit, and outlet that communicates with another conduit, where conduits carry respective solenoid valves

摘要

The device has a vacuum pump (3) with an inlet (3a) that communicates with a vacuum chamber (1) by a first conduit (2), and an outlet (3b) that communicates with a second conduit (4). A third conduit (7) is connected to the second conduit at a point between the vacuum pump and a non-return valve (6) to carry a solenoid valve (8). A fourth conduit (10) is connected to the first conduit at another point between the pump and the chamber to carry another solenoid valve (11). A reservoir (9) includes an inlet communicating with the third conduit, and an outlet communicating with the fourth conduit. The vacuum pump is designed as a multistage roots-type dry vacuum pump. An independent claim is also included for a method for pumping a vacuum chamber.