SURFACE QUALITY MEASURING INSTRUMENT, AND CONTROL DEVICE AND ADJUSTMENT METHOD FOR SURFACE QUALITY MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a surface quality measuring instrument capable of dissolving an error on the whole of each indication range, and to provide a control device and an adjustment method for the surface quality measuring instrument.;SOLUTION: The adjustment method of the surface quality measuring instrument includes: a process P21 for selecting any one of indication ranges Ri as a reference range Rr and setting a calibrating measurement value SAi in each indication range; a process P22 for successively inputting the calibrating measurement values SAi to a range amplifier corresponding to the reference range and acquiring a reference indication value rDATAi; a process P23 for inputting respective calibrating measurement values SAi to the range amplifier corresponding to respective indication ranges and acquiring an AD conversion value ADi and an indication value DATAi; a process P24 for calculating a gain error rate ki=rDATAi/DATAi, indication resolution DIVi=DATAi/ADi and correction indication resolution cDIVi=DIVI*ki; and a process P31 for indicating a correction indication value cDATAi=ADi*cDIVi.;COPYRIGHT: (C)2013,JPO&INPIT