PRODUCTION METHOD OF RECYCLED RESIST AND RECYCLE USAGE OF RESIST

摘要

PROBLEM TO BE SOLVED: To provide a production method of recycled resist having a high storage stability, and provide a recycle usage of resist.;SOLUTION: If a solvent of a used resist is mainly composed of propylene glycol monomethyl ether acetate (PGMEA) and a rinse liquid contains another solvent having the boiling temperature lower than the PGMEA, a used mixture containing the used resist and a waste liquid of the rinse liquid is recovered and concentrated, and then a recycled resist is prepared by adding an unused resist to a concentrated liquid so that a percentage of the unused resist is 20 mass% or more. Consequently, the recycled resist can be produced which is hard to generate foreign matters after a long-term storage and can form a resist film comparable to the unused resist. By using such a method, the resist can be used multiple times.;COPYRIGHT: (C)2013,JPO&INPIT