PROBLEM TO BE SOLVED: To provide an X-ray fluorescence spectroscopy device and an X-ray fluorescence analysis device that can spectrally disperse and analyze a fine amount of elements of 0.5 ppm or less.;SOLUTION: A measurement sample is irradiated with primary X rays 2 from an X-ray source to excite elements in a measurement sample 1, which is made to emit fluorescent X-rays 3 and scattered X rays 4. In a spectroscopy system 20, first spectroscopy means 22, second spectroscopy means 23, and one X-ray detector 24 are so arranged as to constitute an optimized optical system. The first spectroscopy means 22 spectrally disperses and converges the fluorescent X rays 3 on the X-ray detector 24, and the second spectroscopy means 23 spectrally disperses and converges the scattered X rays 4 on the X-ray detector 24. Consequently, the spectroscopy system 20 performs spectral dispersion so that the one X-ray detector 24 can detect the intensity of the fluorescent X rays 3 and the intensity of the scattered X rays 4. An X-ray fluorescence analysis device 30, on the other hand, analyzes with high accuracy a fine amount of elements by reference to an analytical curve based upon the ratio of the intensity of the fluorescent X rays 3 and the intensity of the scattered X rays 4.;COPYRIGHT: (C)2013,JPO&INPIT
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