INDUCTIVELY-COUPLED MICROPLASMA SOURCE IN WHICH PART OF FLOATING ELECTRODE FACES INTERIOR OF GAS FLOW PATH

摘要

PROBLEM TO BE SOLVED: To provide an inductively-coupled microplasma for easy plasma ignition with no addition of an igniter mechanism.;SOLUTION: A spiral coil 5 for generating inductively-coupled plasma is formed of a spiral pipe, and a gas flow path 6 is made of a glass thin pipe. Relating to a floating electrode 2, the floating electrode 2 is sandwiched in a gap formed by jointing together the cylindrical glass thin pipes of the gas flow path 6, a part of which faces the interior of the gas flow path. The magnetic field generated by the spiral coil 5 acts with the floating electrode 2 in an electromagnetic manner. The floating electrode 2 has a shape in which a line extend slightly from a tip of an acute triangle. The floating electrode 2 is covered with a material 4 of high inductivity outside the gas flow path, functioning to receive an electromagnetic field as an electrode having an electrode size larger than actual dimension by inductivity amount. Further, another floating electrode (sub electrode) 3 having smaller size is arranged in the flow path 6.;COPYRIGHT: (C)2013,JPO&INPIT