LIGHT-DARK INSPECTION DEVICE, AND LIGHT-DARK INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of quickly starting a light-dark inspection by shortening a period of time required for processing before starting the light-dark inspection.;SOLUTION: Processing for obtaining the input-output characteristic of a light receiving element E(n) can be excluded by storing element characteristic coefficients A(n), B(n), C(n) showing an input output characteristic of the light receiving element E(n) in an element characteristic coefficient storing portion 270. Meantime, though it is necessary to obtain the light amount distribution of a light irradiating portion 3 in order to suppress the effect given to the light-dark inspection by the light amount distribution of the light irradiating portion 3, the light amount distribution of the light irradiating portion 3 can be relatively quickly obtained. Consequently, a period of time required for the processing before starting the light-dark inspection can be shortened, and the light-dark inspection can be quickly started.;COPYRIGHT: (C)2014,JPO&INPIT