BEAM CHARACTERIZATION MONITOR FOR SENSING PROPERTIES OF OPTICAL BEAM

摘要

PROBLEM TO BE SOLVED: To measure divergence of an optical beam.;SOLUTION: An optical element is configured to provide internal reflection of at least a part of a beam of radiation scanned over varying angles of incidence on the optical element. The optical element has a film configured to provide a surface plasmon resonance (SPR) effect. A detector is arranged relatively to the optical element and configured to electrically detect radiation reflected from the optical element. The divergence angle of the beam of radiation is calculated based on change in reflectance relative to the angles of incidence.;COPYRIGHT: (C)2013,JPO&INPIT