PROBLEM TO BE SOLVED: To provide a precise three-dimensional moving device that can move with high precision and achieve high-precision positioning through high-precision position detection; and a three-dimensional measuring machine.;SOLUTION: A three-dimensional measuring machine 100 includes a precise three-dimensional moving device 200 and a measuring device 300 measuring an object W to be measured. The three-dimensional moving device 200 includes a moving body 31D, first to third driving bodies 41, 41', and 8, first to third driving mechanisms 4, 4', and 4'' which drive the first to third driving bodies 41, 41', and 8 back and forth in first and second mutually orthogonal directions and a perpendicular direction, and first to third laser interferometers 5, 5', and 5'' which detect displacement of the moving body 31D. The first to third driving bodies 41, 41', and 8 have first to third joints 6D, 6D', and 10 forming a static pressure gap with the moving body 31D, and laser optical paths of the first to third laser interferometers 5, 5', and 5'' extend penetrating the first to third driving bodies 41, 41', and 8 and first to third joints 6D, 6D', and 10.;COPYRIGHT: (C)2013,JPO&INPIT
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