IMAGE ACQUISITION DEVICE, IMAGE ACQUISITION DEVICE OBSERVATION FIELD AND IMAGING PIXEL NUMBER CALCULATING METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a technique for reliably acquiring an image suitable for observing a minute defective section.;SOLUTION: An image acquisition device 100 picks up an image of a defective section on a substrate 1. The image acquisition device 100 comprises: a calculation section 3 for calculating an imaging pixel number and an observation field for imaging the defective section; and an imaging section 5 for imaging the defective section on the substrate 1 according to the imaging pixel number and the observation field calculated by the calculation section 3. The calculation section 3 receives defective information relating to a position and a size of the defective section, coordinate accuracy information relating to an error of the imaging section 5 or an error of a defective position, and minimum defective size information relating to a minimum defective size capable of detecting the defective section. The calculation section 3 calculates the imaging pixel number on the basis of the defective information, the coordinate accuracy information, and the minimum defective size information.;COPYRIGHT: (C)2014,JPO&INPIT