SURFACE PLASMON RESONANCE (SPR) SENSOR AND INSPECTION SYSTEM MOUNTING SPR SENSOR

摘要

PROBLEM TO BE SOLVED: To solve such problems that a semiconductor production process is inevitable for a sensor having a metal grating structure to be mounted on an inspection system, that in the structure, resonating incident light from an opening is transmitted through a substrate to influence a resonance degree, and that a sensor having a large resonance degree is desired.;SOLUTION: The inspection system mounts an SPR sensor comprising a sensor that varies an output value by an incident angle or an incident position of a beam. The sensor comprises: a grating structure inducing surface plasmon, the structure patterned into stripes spaced from one another by using a resist material that transmits light, on a light-receiving face of a photoelectric conversion element; a conductor, which is formed into a film that includes the grating structure and covers the structure in a wavy pattern, and which does not transmit light; and an output electrode for outputting a voltage signal from the photoelectric conversion element.;COPYRIGHT: (C)2013,JPO&INPIT