The motion error correction method and active-correcting stage with a 5-degree-of-freedom motion error correction function

摘要

A guide support having a second guide surface and the first orthogonal to each other, and a first face and a second facing the second guide surface and the first invention, each of the second surface and the first The motion error five degrees of freedom for applying a magnetic preload between the table the air bearing is provided, a driving unit which linearly driven along the x axis of the table, and the table and the guide support, generated in the table and a magnetic plurality of actuators for varying the magnetic force between the table and the guide supports to be corrected, the magnetic actuator, and the second first provided so as to be separated in the x-axis direction on the first surface; a fourth actuator and a third actuator, disposed so as to be separated in the x-axis direction on the second surface, the first arranged so as to be separated in the z-axis direction from the fourth actuator and said third second surface; discloses the motion error correction method and an active-correcting stage, characterized in that it comprises an actuator 5.