Replica picking device and replica picking manner

摘要

P To provide a replica sampling device capable of simply and efficiently sampling a replica from the surface of a specimen and capable of evaluating the surface of the specimen and a replica sampling method. PSOLUTION: The replica sampling device is equipped with a holder 20 having two openable and closable arms 21 and 22 having an end part 23 as a fulcrum and a spring 25 for imparting energizing force in the opening direction of the arms 21 and 22 and a replica jig 10 having an elastically deformable fixing plate 11, a reflecting plate 13 provided ON one side of the fixing plate 11 to reflect light, a film 14 for the replica pasted ON the surface of the reflecting plate 13 and an attaching part 12 provided ON the other side of the fixing plate 11 to make the leading end of the arm 21 detachable and keeps the replica jig 10 arranged ON the surface to be inspected of the specimen, the leading end of the arm 22 arranged ON the surface opposed to the surface to be inspected and the arranging position of the replica jig 10 fixed by the energizing force of the spring 25 to transfer the surface state of the surface to be inspected to the film 14. PCOPYRIGHT: (C)2011 and JPO& INPIT