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INFRARED RAY DETECTOR AND INFRARED RAY DETECTOR MANUFACTURING METHOD
INFRARED RAY DETECTOR AND INFRARED RAY DETECTOR MANUFACTURING METHOD
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机译:红外线探测器和红外线探测器的制造方法
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摘要
PROBLEM TO BE SOLVED: To expand pixel areas at the same pixel pitch in a two-wavelength infrared image sensor.;SOLUTION: To achieve the above objective, there is provided an infrared ray detector comprising: a first infrared light absorption layer and a first contact layer which are laminated on one side of a common contact layer; a second infrared light absorption layer and a second contact layer which are laminated on the other side of the common contact layer; an upper pixel separation groove which separates the second infrared light absorption layer and the second contact layer; a lower pixel separation groove which separates the first infrared light absorption layer and the first contact layer formed at positions corresponding to the upper pixel separation groove via the common contact layer; and a contact hole which is formed by removing the second contact layer, the second infrared light absorption layer, the common contact layer and the first infrared light absorption layer for each pixel separated by the upper and the lower pixel separation grooves.;COPYRIGHT: (C)2013,JPO&INPIT
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