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INFRARED RAY DETECTOR AND INFRARED RAY DETECTOR MANUFACTURING METHOD

机译:红外线探测器和红外线探测器的制造方法

摘要

PROBLEM TO BE SOLVED: To expand pixel areas at the same pixel pitch in a two-wavelength infrared image sensor.;SOLUTION: To achieve the above objective, there is provided an infrared ray detector comprising: a first infrared light absorption layer and a first contact layer which are laminated on one side of a common contact layer; a second infrared light absorption layer and a second contact layer which are laminated on the other side of the common contact layer; an upper pixel separation groove which separates the second infrared light absorption layer and the second contact layer; a lower pixel separation groove which separates the first infrared light absorption layer and the first contact layer formed at positions corresponding to the upper pixel separation groove via the common contact layer; and a contact hole which is formed by removing the second contact layer, the second infrared light absorption layer, the common contact layer and the first infrared light absorption layer for each pixel separated by the upper and the lower pixel separation grooves.;COPYRIGHT: (C)2013,JPO&INPIT
机译:解决的问题:在双波长红外图像传感器中以相同的像素间距扩展像素区域。解决方案:为了实现上述目的,提供了一种红外线检测器,其包括:第一红外吸收层和第一红外吸收层。接触层,其层压在公共接触层的一侧上;在公共接触层的另一侧层叠有第二红外吸收层和第二接触层。上像素分离槽,其分离第二红外光吸收层和第二接触层。下像素分离槽通过公共接触层将形成在与上像素分离槽相对应的位置处的第一红外光吸收层和第一接触层分离。对于通过上下像素分离槽分离的每个像素,通过去除第二接触层,第二红外光吸收层,公共接触层和第一红外光吸收层而形成的接触孔。 C)2013,日本特许厅

著录项

  • 公开/公告号JP2013026285A

    专利类型

  • 公开/公告日2013-02-04

    原文格式PDF

  • 申请/专利权人 FUJITSU LTD;

    申请/专利号JP20110156995

  • 发明设计人 NISHINO HIROSHI;FUJII TOSHIO;

    申请日2011-07-15

  • 分类号H01L31/0264;H01L27/144;

  • 国家 JP

  • 入库时间 2022-08-21 16:59:04

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