MEDICAL COMPOSITE SINGLE-CRYSTAL PIEZOELECTRIC VIBRATOR, MEDICAL ULTRASONIC PROBE, METHOD OF MANUFACTURING MEDICAL COMPOSITE SINGLE-CRYSTAL PIEZOELECTRIC VIBRATOR, AND METHOD OF MANUFACTURING MEDICAL ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To provide a composite single-crystal piezoelectric vibrator that can be improved in performance such as electrostatic capacity between channels after array dicing, a coupling coefficient, sensitivity, and a specific band.;SOLUTION: A plurality of single-crystal piezoelectric vibrating elements are arrayed in at least one of a first direction and a second direction orthogonal to the first direction. Electrodes are provided on an ultrasonic radiation surface side and a back surface side parallel with the first and second directions respectively among a plurality of surfaces of the single-crystal piezoelectric vibrating elements. A medical composite single-crystal piezoelectric vibrator is such that the single-crystal vibrating element on the ultrasonic radiation surface has a crystal orientation {100}, a crystal orientation of a first surface, perpendicular to the first direction, of at least one of the single-crystal piezoelectric vibrating elements being different from crystal orientations of first surfaces of other single crystal piezoelectric vibrating elements, and a crystal orientation of a second surface, perpendicular to the second direction, of at least the one of the single-crystal piezoelectric vibrating elements being different from crystal orientations of second surfaces of the other single crystal piezoelectric vibrating elements.;COPYRIGHT: (C)2013,JPO&INPIT