DEVICE AND METHOD FOR FORMING MULTI-DIMENSIONAL PATTERN BY ULTRASHORT PULSE LASER

摘要

PROBLEM TO BE SOLVED: To establish a high-speed and highly accurate piercing technique using an ultrashort pulse laser such as a picosecond laser.SOLUTION: This device 10 for forming a multi-dimensional pattern by the ultrashort pulse laser includes: a picosecond laser oscillator 12; a beam rotator 18 having an optical system 28 for adjusting an incident angle of a laser beam L with respect to a workpiece , an optical system 32 for adjusting a turning radius, adjusting the turning radius in the workpiece, and a converging optical system 34; a processing head 20 having a galvano scanner 36 and a projection lens 38; a vertical movement drive mechanism vertically moving the processing head 20 by a required amount; a processing table 40 on which the workpiece is loaded; a vertical movement drive mechanism vertically moving the processing table 40 by a required amount; and a rotary drive mechanism rotating the processing table 40 by the required amount. The converging optical system 34 of the beam rotator 18 is made of an aplanatic lens.