The first die where pattern

摘要

PROBLEM TO BE SOLVED: To provide an imprint tool used for thermal nono-imprint, which enables easy releasing of a stamper having a specified pattern and a plastic sheet to which the pattern formed on the stamper is transferred.;SOLUTION: The imprint tool has a first mold having the pattern for transfer which is formed on a surface for transferring the pattern to a thermoplastic sheet, and a mold holder for fixing the first mold. An elastic member is provided between the first mold and the mold holder. The sheet is arranged on the elastic member surface that is opposite to the surface contacting the first mold. A second mold is provided opposite to the sheet of the first mold. A means for decreasing adhesion is provided between the elastic member and the first mold, or between the elastic member and the mold holder.;COPYRIGHT: (C)2009,JPO&INPIT