RESOURCE RECYCLING APPARATUS, PROCESSING APPARATUS GROUP CONTROLLER, RESOURCE RECYCLING SYSTEM, RESOURCE RECYCLING METHOD AND RESOURCE RECYCLING PROGRAM

摘要

PROBLEM TO BE SOLVED: To efficiently use recycled resources generated by collecting used resources such as waste heat and to reduce energy consumption.SOLUTION: A resource recycling apparatus 6 comprises: resource collecting sections 34, 35 and 36 for collecting used resources exhausted from a plurality of respective processing apparatuses that process a workpiece; resource generating sections 31, 32 and 33 for generating recycled resources from the resources collected at the resource collecting sections; and resource distributing sections 37, 38, 39, 40, 41 and 42 for distributing the recycled resources to the plurality of respective processing apparatuses, on the basis of types of the plurality of respective processing apparatuses, processing contents executed at respective processing steps for the workpiece by the plurality of processing apparatuses, and operation states and plans of the plurality of processing apparatuses.