Originating in the alignment error

摘要

PROBLEM TO BE SOLVED: To provide an aberration measurement and error correction method capable of correcting a measurement error generated due to an alignment error of a lens to be inspected in aberration measurement of a lens to be inspected on the basis of transmission wavefront measurement.;SOLUTION: The correspondence relationship between the amount of generation of an alignment error and the amount of generation of aberration is obtained by computer simulation, and the actual amount of generation of the alignment error is measured. On the basis of the obtained correspondence relationship and the actual amount of generation of the alignment error, the prediction amount of generation of aberration predicted to be generated due to the actual amount of generation is obtained, and the measurement error is corrected on the basis of the predicted amount of generation.;COPYRIGHT: (C)2010,JPO&INPIT