The vacuum control unit of the treatment chamber in the semiconductor central processing unit and the semiconductor central processing unit which has this

摘要

Topic It uses for the treatment chamber of the semiconductor central processing unit, the vacuum the vacuum control unit space saving is offered.SolutionsTreatment chamber it is provided with 13 of semiconductor central processing unit 11 and vacuum blower, 20 in treatment chamber the vacuum control unit 15 which is jointed with 13 and vacuum blower 20 it is, vacuum control unit 15 becomes, treatment chamber the exhaust air shutoff valve controlling the exhaust air capacity of 25 where cuts off the exhaust air channel 21 with 13 and vacuum blower 20 and exhaust air channel, 21 the pressure control valve 27 which adjusts the pressure inside treatment chamber 13 being installed. Choice figure Drawing 1