Coating removal device of the beam irradiation electrode in the ion source, ion source with the same, and coating removal for members of the beam irradiation electrode

摘要

PPROBLEM TO BE SOLVED: To provide a film removing device of a beam irradiation electrode capable of removing a film of a beam irradiation electrode while suppressing a damage in an ion source, an ion source equipped with this, and a member for removing a film of a beam irradiation electrode. PSOLUTION: In this device, a voltage is impressed between a beam irradiation electrode 25 at a position opposing a tip end of the beam irradiation electrode 25, and thereby, an ion raw material gas or a liquid metal supplied to the tip end of the beam irradiation electrode 25 is field-ionized by a high electric field and the ionized ion raw material gas or the liquid metal is extracted as ion beams, and a secondary electron discharging part 51 which discharges secondary electrons after colliding with these ion beams is provided on a moving member 150, and this secondary electron discharging part 51 has a shape for shielding an advance of the ion beams, when being at the discharge position P2 at which the discharge of secondary electrons is possible while opposing to the tip end of the beam irradiation electrode 25. PCOPYRIGHT: (C)2010,JPO&INPIT