The SF6 gas recovery method and SF6 gas recovery equipment of SF6 gas liquefaction

摘要

PPROBLEM TO BE SOLVED: To provide SF6 gas recovery equipment and an SF6 gas recovering method which enable easy and rapid purification of a mixture SF6 in a gas recovery tank. PSOLUTION: The gas recovery equipment 50 includes a purity estimation device 100 including an input means 1 of inputting measured weight data 11, measured temperature data 12 and gas-phase purity data 13 on SF6 stored in an SF6 recovery tank; database 2 storing a linear correlation 23 acquired with the preliminarily measured gas-phase purity data 21 and liquid-phase purity data 22 as coordinate axes when the SF6 stored in the SF6 recovery tank is a mixture 56; and a calculation processing means 3 of calculating weights of the gas phase and the liquid phase SF6 (56A, 56B) from the measured weight data 11 and the measured temperature data 12, estimating the purity 26 of the liquid phase SF6 from the gas-phase purity data 13 by using the linear correlation 23 stored for the mixture 56 and calculating the purity 27 of the mixture 56 from the estimated purity 26 of the liquid phase SF6 and the measured weight data 11. PCOPYRIGHT: (C)2012,JPO&INPIT