The heat regulation functional equipped mirror, being the heat regulation functional equipped mirror which

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of further miniaturizing a mirror with a temperature adjusting function.;SOLUTION: The mirror 2 with the temperature adjusting function includes a temperature measurement element 21, a thermo-element 22, a temperature adjusting electrode 23 and a temperature non-adjusting electrode 24 for energizing the thermo-element 22, and a substrate 20. The substrate 20 has a diaphragm structure where a recessed part 20a is formed in the back surface. The temperature measurement element 21 is a platinum resistor whose resistance value is changed according to the temperature. Then, the temperature measurement element 21 is formed as a thin film in a diaphragm area where the recessed part 20a is formed and the thickness of the substrate is reduced on the main surface of the substrate 20. The thermo-element 22 is an element for performing heating or cooling by heat transfer utilizing the Peltier effect and is formed as a thin film so as to surround the periphery of the temperature measurement element 21 on the main surface of the substrate 20. The temperature adjusting electrode 23 is formed at the inner peripheral part of the thermo-element 22 formed so as to surround the periphery of the temperature measurement element 21, and the temperature non-adjusting electrode 24 is formed at the outer peripheral part of the thermo-element 22.;COPYRIGHT: (C)2009,JPO&INPIT