Rack-and-pinion mechanism, vacuum processing apparatus, drive control method of the rack-and-pinion mechanism, and a recording medium drive control program

摘要

With simple feature the plating rack gear and the tip with the pinion gears and the phase gap you evade the collision, the plating rack gear and the pinion gears the Bite see smoothly and adjust. Loading the object to be conveyed, in the plating rack gear the multiple pinion gears 17 which are concatenated 16 which is locked to the mount base 20 which moves on conveying raceway 7 and Drive source 13 and, to have, among these pinion gears, two doing turning synchronization at least and consecutively gearing making the plating rack gear, transferring the plating rack gear to the pinion gears of the next process from the pinion gears of present process, being the plating rack and pinion feature which it conveys, the means which detect the phase difference of the pinion gears and, to possess the storage section 27 which stores the phase difference which is detected, phase difference of the pinion gears of present processOf on the basis, the control unit 25 which controls the phase difference of the pinion gears of the next process and, it has.