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Method for producing gold or gold alloy for vacuum deposition or sputtering, and method for producing hearth ingot

机译:用于真空沉积或溅射的金或金合金的生产方法以及炉床锭的生产方法

摘要

PROBLEM TO BE SOLVED: To provide a gold or gold-alloy material for thin film deposition in which impurities contained in the inner part and impurities adhering to the external surface are minimized and its manufacturing method and also to provide a hearth ingot and its manufacturing method. SOLUTION: The gold or gold-alloy material for thin film deposition is composed of gold of =4N purity and the proportion of gold exceeds 50% by mole ratio, and further, the content of volatile metallic impurities is made to =1 wt.ppm and the content of hydrogen and nitrogen is made to =1 wt.ppm, respectively, and also oxygen content is made to =5 wt.ppm. This material can be manufactured by heating and melting the gold of =4N by the zone melting and refining process in a high vacuum of =110-3 Pa. Moreover, the hearth ingot has a shape where at least a part of the casting surface of the upper surface is constituted of a smooth melting surface and the central part 1 of the upper surface is swollen and becomes higher than the rim 2 of the upper surface.
机译:解决的问题:提供一种用于薄膜沉积的金或金合金材料,其中将内部所含杂质和粘附至外表面的杂质减至最少,并提供其制造方法,并提供炉锭及其制造方法。解决方案:用于薄膜沉积的金或金合金材料由纯度> = 4N的金组成,并且金的比例超过50摩尔%,并且使挥发性金属杂质的含量≤1 wt%此外,使氢和氮的含量分别≤0.1ppm.ppm,并且氧含量≤5wt.ppm。该材料可以通过在≤110-3Pa的高真空下通过区域熔化和精炼工艺将> = 4N的金加热和熔化来制造。此外,炉床锭的形状至少为一部分上表面的铸造表面由光滑的熔化表面构成,并且上表面的中央部分1膨胀并且变得高于上表面的边缘2。

著录项

  • 公开/公告号JP5097890B2

    专利类型

  • 公开/公告日2012-12-12

    原文格式PDF

  • 申请/专利权人 株式会社アルバック;

    申请/专利号JP20010070733

  • 发明设计人 上村 哲治;大場 彰;南 明;

    申请日2001-03-13

  • 分类号B22D21;B22D27/04;C22B9/02;C22B9/04;C22B11/02;C22C1/02;C22C5/02;

  • 国家 JP

  • 入库时间 2022-08-21 16:56:18

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