Hole defect detection apparatus and hole defect detection method

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for detecting a hole defect detecting accurately existence of a hole defect and the position if a hole defect exists, by preventing surely excessive detection of hole defects of an inspection object by a light receiving part.;SOLUTION: In the hole defect detection device having a constitution for allowing the inspection object to enter between a light projection part 2 and the light receiving part 3 in a direct direction to an array direction of the light receiving part 3, and detecting successively by the light receiving part 2, light irradiated from the light projection part 2 and transmitted through a hole defect 1a of the inspection object, a plurality of shielding plates 5 for partitioning longitudinally a space by being erected toward a direction of the inspection object from the light projection part 2 and/or the light receiving part 3 are placed side by side in at least either space of a space between the light projection part 2 and the inspection object and a space 4 between the light receiving part 3 and the inspection object.;COPYRIGHT: (C)2010,JPO&INPIT