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Systems and methods for the detection and quantification of the wafer edge (edge) features
Systems and methods for the detection and quantification of the wafer edge (edge) features
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机译:用于检测和量化晶圆边缘(边缘)特征的系统和方法
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摘要
Method for improving the detection and quantification of the features in the edge of the wafer / wafer roll-off region is disclosed herein. Modifications and improvements make it possible to increase the range and improve the accuracy of feature detection is made to the conventional method.
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