Storage and transfer method of storage and transfer system and the plate-like material of the plate-like material

摘要

PPROBLEM TO BE SOLVED: To provide a plate-like object storage transfer system capable of transferring a plate-like object to the other side from one side of a first area and a second area in a boundary part between the first area and the second area, with a sealed vessel for storing the plate-like object as a storage place, in the second area lower in cleanliness than the first area, adjacent to the first area of a clean atmosphere for treating the plate-like object such as a substrate for a FDP in its atmosphere. PSOLUTION: This plate-like object storage transfer device has a plate-like object vessel sealable for storing the plate-like object and having an opening-closing part on its side surface side, a plate-like object vessel storage part arranged in the second areas and storing the plate-like object vessel, a plate-like object vessel placing part arranged in the second area and placing the plate-like object vessel for carrying and storing, a vessel opening-closing preparing mechanism part arranged in the boundary part between both areas and preparing so that the opening-closing part of the plate-like object vessel can be opened in the atmosphere of the first area when transferring the plate-like object to the other side from one side of the first area and the second area, and a plate-like object taking in and out part arranged on the first area side and taking in and out the plate-like object from the plate-like object vessel. PCOPYRIGHT: (C)2009,JPO&INPIT