Being the accurate thermometry null process chamber

摘要

Topic SolutionsWith the temperature inspection element, accurate the place thermometry is made possible. The temperature inspection element is arranged inside the process chamber. The temperature inspection element has had the cavity, in order to cover the open part of the cavity, the transparency cover is arranged. The material, is arranged inside the cavity of the temperature inspection element, in order the sensor, to inspect the phase change of the material through the transparency cover, is constituted. Selective figure Figure 3