The fluid air heater, the production manner, being the substrate central processing unit which has the fluid air heater and the fluid air heater which

摘要

Fluid air heater 20 the passage tube has with the heating unit 23 which heats 26 where the fluid which it should heat is let flow and passage tube 26. 1 or plural being full filler 30 are provided inside passage tube 26. Baseplate processor 60 heating the liquid of the organic solvent which is supplied by the resource 92 which supplies the liquid of the organic solvent which possesses volatility and resource 92 forms the steam of the organic solvent, the aforementioned fluid air heater it accommodates 20 and baseplate W, this the chamber 65 which dries the baseplate W which is accommodated it is, the chamber 65 where the steam of the organic solvent which is formed by fluid air heater 20 is supplied and, it has.