Sensor and form position verification manner for form position verification

摘要

P To provide a sensor for confirming a shape/a position capable of confirming the shape and position of a substrate. PSOLUTION: The sensor (150) for confirming the shape/the position has a sheet-shaped piezoelectric material (151) with a pressure-measuring region (X1). The pressure-measuring region has a plurality of the first pair of band-shaped electrodes arranged in the specified direction ON one surface of the sheet-shaped piezoelectric material and a plurality of the second pair of the band-shaped electrodes arranged in the direction at the fixed angle to the specified direction ON the other surface of the sheet-shaped piezoelectric material. In the sensor, the pressure-measuring region is disposed in conformity with the shape of the sheet-shaped measuring object, and measures voltages among the first pair of the band-shaped electrodes and the second pair of the band-shaped electrodes, and a pressure distribution in the pressure-measuring region is measured and thus configuring the shape and position of the sheet-shaped measuring object so as to be able to be confirmed. PCOPYRIGHT: (C)2009 and JPO& INPIT