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Alkaline developable resin, photosensitive resin composition containing the manufacturing method and the alkaline developable resin,

机译:碱性显影剂,含有该显影剂的感光性树脂组合物和碱性显影剂,

摘要

Topic SolutionsIn regard to the device which is produced the new alkaline development possible resin, the production method, making use of the photosensitive resin composition which includes the aforementioned alkaline development possible resin and that, it uses the aforementioned alkaline development possible resin as the component of the photosensitive composition degree of exposure to light and development characteristic and improving the remaining membrane ratio of pattern can do this invention, when. Selective figure It is not
机译:解决方案对于生产新的碱性显影可能的树脂的装置,其制造方法利用包括上述碱性显影可能的树脂的光敏树脂组合物,并且使用上述碱性显影可能的树脂作为树脂。本发明是在感光性组合物的成分,曝光量和显影特性,以及提高图案的残留膜比率时的情况。<选择图>并非如此。

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