In the surface discontinuity survey instrument and the surface discontinuity inspection

摘要

PROBLEM TO BE SOLVED: To provide a novel surface defect inspection device and surface defect inspection method for accurately and almost simultaneously detecting small rugged defects and pattern-like defects.;SOLUTION: The method for inspecting defects on an inspected surface by injecting linear polarized light into the inspected surface and receiving its reflected light by three light receiving cameras 29a, 29b, 29c, includes arranging the first light receiving camera 29a and the second light receiving camera 29b out of the three light receiving cameras 29a, 29b, 29c on a regular reflection optical path from the inspected surface, while arranging the third light receiving camera 29c shifted by a predetermined angle from the regular reflection optical path, and receiving the reflected light from the inspected surface simultaneously by the light receiving cameras 29a, 29b, 29c to inspect defects on the inspected surface. Even the small rugged defect which was difficult to identify in a conventional polarization type surface defect inspection device can thereby be identified with high accuracy, not to mention the small pattern-like defect.;COPYRIGHT: (C)2009,JPO&INPIT