The piezoelectric oscillator, production method null of the oscillator, the electronic equipment and the radio wave clock, and the piezoelectric

摘要

This piezoelectric vibrator junction mutually, parallel with the based substrate and the lid substrate where the cavity was formed between extending the lamp foot electrode which is jointed to the oscillation electrode of the pair which vibrates the vibrating arm part of the pair which is present and the vibrating arm part of this pair and the oscillation electrode of this pair electrically and, it possesses, through this lamp foot electrode, in order to cover the piezoelectric vibrating reed and the oscillation electrode inside the cavity lamp foot on the based substrate, in order to be laid out inside the insulating film and the cavity which form a membrane on the piezoelectric vibrating reed, either the based substrate or the lid substrate it is formed by the substrate of one side,It has with the getter material which consists of the metallic materials which improve the degree of vacuum inside the cavity by the fact that it is heated.