Rotary encoder, a rotary motor, the manufacturing method of the rotary motor system, a disk and a rotary encoder

摘要

PROBLEM TO BE SOLVED: To provide a rotary encoder, a rotary motor, a rotary motor system, a disk and a method for manufacturing the rotary encoder which can facilitate miniaturization, manufacturing, etc., while improving a resolution by utilizing diffraction interference light.;SOLUTION: The encoder 100 includes a disk-shaped disk 110 which is disposed rotatably around a rotation axis AX and has one or more ring-shaped tracks TA-TC having respective rotation gratings L, and a mask 120 which is disposed fixedly opposite to the disk 110 so that it may constitute an optical system of diffraction interference with the rotation gratings L and where one or more fixed gratings G1 and G2 are formed. A plurality of slits SLA and SLB included in at least one of rotation gratings LA and LB are formed along a curved line LINE2 formed by curving a plurality of radial lines LINE1 around the rotation axis AX as the center in the circumferential direction at a prescribed curving rate C so that pitches P_LA and P_LB of the slits SLA and SLB can be set at prescribed values.;COPYRIGHT: (C)2011,JPO&INPIT