Laser processing apparatus and optical path adjusting method in laser processing apparatus

摘要

PPROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which facilitates adjustment of the irradiation direction of a laser beam to a slit even if the laser beam to be used for laser beam machining is invisible light, and also to provide an optical path adjusting method in the laser beam machining apparatus. PSOLUTION: The laser beam machining apparatus 1 is constituted so that laser beams having a plurality of wavelengths including those in invisible region are emitted from a laser oscillator 10 and, of the laser beams, these having a prescribed wavelength are filtered by any of wavelength filters 32a-32d, and the filtered laser beams are reflected by reflection angle adjusting mirrors 33a-33d and emitted to a target 42 arranged in an optical path, and the target 42 converts the laser beams to visible light and reflects them, thereby the position of irradiating the slit with the laser beams can be made visible. PCOPYRIGHT: (C)2010,JPO&INPIT