Micro plasma jet reactor, and micro plasma jet generator

摘要

PROBLEM TO BE SOLVED: To provide a microplasma jet reactor and a micro plasma jet generator for generating a nitrogen radical jet longer in jet length than ever.;SOLUTION: The microplasma jet reactor includes first and second electrodes 2a and 2b comprising a sheet-like ceramic dielectric 4 and a conductive film 3 provided in its inside and layered with a prescribed clearance between them. A gas introducing circulation forming section forming a gas introducing circulation section 21 to introduce and circulate nitrogen gas is provided by a bulkhead plate 9 and a retaining member 7. By introducing a nitrogen gas into a space between the unit electrodes 2a and 2b from the gas introducing circulation section 21 through a through-hole 15 and applying a voltage between the unit electrodes 2a and 2b, a plasma reactor 1 discharges a nitrogen radical jet outside the space between the unit electrodes 2a and 2b. A non-discharge portion 12 is provided to surround a discharge portion 11 and discharges nitrogen gas so as to enclose the nitrogen radical jet.;COPYRIGHT: (C)2010,JPO&INPIT