Glass substrate as well as the processing method of the glass substrate end surface and evaluation method of the glass substrate end surface

摘要

Evaluation method of a glass substrate end face can be accurately assess the properties of the end surface of the glass substrate, and a method of processing the glass substrate end face based on this evaluation method, and based on the processing method, the present invention, the glass substrate end face providing a glass substrate can be a glass substrate which can reduce the adhesion of dust, preventing the drawbacks occurring burning, chipping, chipping of the chamfered surface on the basis of this processing method. In accordance with the present invention, binarized black and white image of the end face Z picked up by 14 laser microscope, and was identified as a black image specular white image, of the end face, to an area of ​​the black image a recess is present on the end face To evaluate the properties of the edge of the glass substrate based on the ratio of the area of ​​the white image. According to this evaluation method, in comparison with an evaluation method by roughness tester the existing system that depends on the size of the recess reliability of accuracy exists in the end face Z, more properties of the end face Z of the glass substrate G It can be evaluated accurately.