Being adjustment manner of the guide device where adjustment manner of the guide device for the object lens

摘要

PROBLEM TO BE SOLVED: To easily place the front end surface of a fine-diameter front end part, in an appropriate and satisfactory manner, the position with respect to an object of observation, in a state of the observation position not being fixed, and to simply and quickly acquire the image of the region of an object to be observed.;SOLUTION: An adjusting method for a guide device 3 which is mounted on the front end of an objective lens 2, being position adjustable in the optical axis direction and contacted with an observation object so as to make the focal position of the objective lens 2 coincide with an observation position, includes steps where in addition, a screen 1 for adjustment having a prescribed pattern is fixed to the front end surface of a guidance device 3; the guidance device 3, to which the screen 1 for adjustment is fixed, and the objective lens 2 are relatively moved in the optical axis direction; and then the relative position between the objective lens 2 and the guide device 3 is fixed, at a position where an image which is focused on the pattern of the screen 1 for adjustment is gained, or at a position at which the screen 1 and the guide device 3 are relatively moved farther by a prescribed distance from the position, and then the screen 1 for adjustment is removed from the guidance device 3.;COPYRIGHT: (C)2008,JPO&INPIT