Optical displacement meter, optical displacement measuring method, optical displacement measuring program

摘要

PROBLEM TO BE SOLVED: To provide an optical displacement gauge in which light-sensitive elements are deployed two-dimensionally capable of obtaining stable amount of light received depending on work piece.;SOLUTION: The optical displacement gauge is equipped with a two-dimensional light-sensitive element receiving reflected light of band light from a measured object to output as received signal in each location in a first direction, a light receiving level controlling means 61 controlling at least either parameters of light emitting amount of a light projecting section 3 or handling amount including amplification factor of an amplifier so as to set the distribution of each peak of amplification signal acquired with the amplifier in the first direction within a predetermined range, and a mode switching means 53 for switching between measuring mode measuring displacement of the measured object and setting mode setting the handling amount of the light receiving level controlling means 61. Since the light projecting section 3 irradiating band light to preliminarily to the measured object and measuring the distribution state of the peak of amplification signal at each location in the first direction in the setting mode, the light receiving level controlling means 61 can adjust handling amount depending on the distribution state in the first direction.;COPYRIGHT: (C)2008,JPO&INPIT