The minute electronic machine component and inside providing the minute electronic

摘要

PROBLEM TO BE SOLVED: To provide a microelectromechanical element having a structure in which stress is substantially not applied to torsion bars even when an outer frame is fixed by a bonding material.;SOLUTION: An inner frame 3 provided with a movable part 1 is rockably supported with respect to the outer frame 5 by a first torsion bar 4. The outer frame 5 includes a fixed part which is fixed by the bonding material 10. A first opening 20 is formed in the vicinity of the first torsion bar 4 on the outer frame 5. The first open part 20 is located between the fixed part of the outer frame 5 and the first torsion bar 4.;COPYRIGHT: (C)2010,JPO&INPIT