Sample dimensional inspection and measurement methods, and sample size test and measurement equipment

摘要

As for main intended one of this invention, are the sample size measuring method which always detects edge position at the same precision the edge of two dimensional pattern regardless of the direction of the edge, and the times when the sample size measurement equipment is offered. According to this invention, you propose that in order to achieve the above-mentioned purpose, it depends on the scan direction of the electron beam for the pattern edge direction of inspection object pattern, revises the change of the signal ripple mark of the secondary electron. In addition, adjusting to the direction of the pattern which measures the scan direction of the electron beam, when it changes, you lecture about scan direction and the fact that error of scan position is revised. According to this kind of constitution, regardless of the scan direction of the electron beam, it can obtain sufficient edge detection precision.