Plasma EUV light source which generates a high-repetition rate lasers

摘要

Generation of EUV light used and individual targets in the form of solid particles embedded in droplets or droplet or solid particles has been sent to the irradiation site for the [issue] a laser produced plasma, irradiation with a pulsed laser beam and to provide a system for. Supplying target forming system the individual targets, the target formation and supplying pulse laser the laser pulse is focused into the desired target ignition site [MEANS FOR SOLVING PROBLEMS] selected pulse repetition rate, the selection interval that has been adjusted to the laser pulse repetition rate to enable the target steering system in the middle of the target ignition site and desired system, that the target steering system directs the desired target ignition site targets, and information on the movement of the target between the target steering system and the target forming system and method EUV light source device may include a target tracking system providing. Target tracking system, each point including a collimating light source that is directed to provide the information to enable the creation of a laser firing control signals and can, so as to intersect with the points of the projected delivery path on the target drop detector having a light detector disposed opposite each for detecting passage of the target through, or can include a detector comprising a linear array of a plurality of photosensitive elements aligned with the coordinate axis, light from the light source, The projection intersects the delivery path of the target, one of which, it is possible to include a flat cut-off detector. Droplets plurality of detectors operating at optical frequencies, each different, or drop detector may include a camera and a two-dimensional array of pixels for imaging a field of view and the visual field. It can include equipment containment electrostatic plasma results in the field confinement plasma at or near the target ignition site upon ignition, the target tracking system, apparatus and method allows the control of the device containment electrostatic plasma I will provide a signal. The apparatus and method may comprise a container for maintaining a pressure differential across the low pressure trap by allowing passage of the EUV light by an intermediate wall with a low pressure trap. Methods and equipment, may include a mechanism confinement magnetic plasma that produces near the target ignition site a magnetic field for confining the target ignition site plasma can be controlled by using the output from the target tracking system is pulsed possible. [Selection] Figure Figure 1