A method of manufacturing the magnetostrictive film, magnetostrictive element, torque sensors, force sensors, pressure sensors and

摘要

Is to provide a method of manufacturing the same, and the magnetostrictive films can exhibit magnetostrictive excellent properties in zero magnetic field around. Is sprayed form the subject on, and lower than the glass transition temperature, is composed of a film of a metallic glass is characterized in that it is heat-treated at the Curie point temperature or higher, -15kA / m or more, the magnetostrictive films, + 15kA / m Within some, magnetostrictive magnetic field exhibits a linear characteristic at least one of the magnetic field range below.