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LARGE SCALE PLATE AND METHOD FOR UNIFORMLY POLISHING LARGE SCALE PLATE
LARGE SCALE PLATE AND METHOD FOR UNIFORMLY POLISHING LARGE SCALE PLATE
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机译:大型板和均匀抛光大型板的方法
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摘要
Disclosed is a substrate polishing method capable of minimizing a difference of polishing amounts between a center portion and a rim portion of a large scale plate during a plate polishing process.
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