DIAPHRAGM POSITION MEASURING METHOD, DIAPHRAGM POSITION MEASURING APPARATUS, DIAPHRAGM POSITIONING METHOD AND DIAPHRAGM POSITIONING APPARATUS

摘要

A diaphragm position measuring method and a diaphragm position measuring apparatus are disclosed, which are capable of measuring a deviation quantity between a center of an optical diaphragm and an optical axis with high accuracy. A diaphragm positioning method and a diaphragm positioning apparatus are further disclosed, which are capable of disposing the optical diaphragm in a lens unit with the high accuracy. A light condensing spot is formed by getting a collimated beam of light incident upon lenses of the lens units supported on a glass sheet, and a position of the light condensing spot, if detected by a microscope, can be used as a reference point for positioning the optical diaphragm. A central processing unit can obtain a deviation quantity between the position of the light condensing spot and a central position of the optical diaphragm, which is acquired by the microscope, and the lens unit can be effectively inspected by use of a result thereof. It is thereby feasible to detect the deviation quantity of the central position of the optical diaphragm with an error equal to or smaller than ±3 μm.