首页>
外国专利>
METHOD AND ELECTRONIC DEVICE FOR A SIMPLIFIED INTEGRATION OF HIGH PRECISION THINFILM RESISTORS
METHOD AND ELECTRONIC DEVICE FOR A SIMPLIFIED INTEGRATION OF HIGH PRECISION THINFILM RESISTORS
展开▼
机译:高精度薄膜电阻器简化集成的方法和电子装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to a method of manufacturing an integrated circuit. An electrically resistive layer of a material for serving as a thin film resistor (TFR) is deposited. A first electrically insulating layer is deposited on the electrically resistive layer of the TFR. An electrically conductive layer of an electrically conductive material is deposited. An area is left without the conductive layer and the area overlaps the electrically resistive layer of the TFR. A second electrically insulating layer is deposited on top of the conductive layer. A first VIA opening is etched through the second insulating layer, the area without the conductive layer adjacent to the electrically conductive layer and through the first insulating layer down to the electrically resistive layer of the TFR. A conductive material is deposited in the first VIA opening so as to electrically connect the conductive layer and the electrically resistive layer of the TFR.
展开▼