GAS FLOW-RATE VERIFICATION SYSTEM AND GAS FLOW-RATE VERIFICATION UNIT

摘要

A gas flow-rate verification system includes: process gas lines each being arranged to supply gas from a process gas supply source to a process chamber through a first line cutoff valve, a second line a cutoff valve, and flow control device; and a shared gas line connected in a branch form to the process gas lines to discharge gas from a shared gas supply source through the second line cutoff valve and the flow control device. The shared gas line includes a shared cutoff valve, a measuring tank, a first pressure sensor, and a pressure regulating valve. When the first line cutoff valve and the shared cutoff valve are closed, the first pressure sensor measures a pressure drop of gas in the tank to verify a flow rate of the flow control device. The pressure regulating valve feedback-controls secondary side pressure of the pressure regulating valve.