OPTICAL APPARATUS, MEASURING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides an optical apparatus which detects an image of a mark on a substrate, the apparatus including an optical system configured to form an image of the mark, a detector configured to detect the image, wherein the optical system includes an aperture stop, an aperture, corresponding to a first field of view and a second field of view of the detector, being formed in the aperture stop, a light-shielding member, and a driving mechanism configured to position the light-shielding member so that one of the first field of view and the second field of view is valid, and a part of the other is invalid.