NANOLAMINATES OF Al2O3/TiO2 WITH GIANT DIELECTRIC CONSTANT LOW-LEAKAGE-LOW LOSS-EXTENDED FREQUENCY OPERATION FOR NEW-GENERATION NANOELECTRONICS AND ENERGY STORAGE DEVICES

摘要

The invention relates generally to a nanolaminate structure involving Al₂O₃ thin films as a main component. The nanolaminate is used between a top electrode and a bottom electode to form a capacitor. The naonolaminate layer comprises alternating layers of Al₂O₃ and TiO₂ and an interfacial layer.